[PDF] Top 20 High-performance top and bottom double-gate low-temperature poly-silicon thin film transistors fabricated by excimer laser crystallization
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High-performance top and bottom double-gate low-temperature poly-silicon thin film transistors fabricated by excimer laser crystallization
... Results and discussion ...a-Si thin film with excimer laser ...the excimer laser irradiation is applied on the a-Si thin film, the applied laser energy density is ... See full document
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High-performance self-aligned bottom-gate low-temperature poly-silicon thin-film transistors with excimer laser crystallization
... Laser Crystallization Chun-Chien Tsai, Hsu-Hsin Chen, Bo-Ting Chen, and Huang-Chung Cheng Abstract—In this letter, high-performance bottom-gate (BG) ... See full document
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High-performance short-channel double-gate low-temperature polysilicon thin-film transistors using excimer laser crystallization
... Lee, and Huang-Chung Cheng Abstract—In this letter, high-performance low-temperature polysilicon thin-film transistors (TFTs) with double-gate (DG) ... See full document
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High-Performance Polycrystalline-Silicon Nanowire Thin-Film Transistors With Location-Controlled Grain Boundary via Excimer Laser Crystallization
... Cheng, and Huang-Chung Cheng Abstract—High-performance polycrystalline-silicon (poly-Si) nanowire (NW) thin-film transistors (TFTs) are demonstrated using ... See full document
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Polycrystalline silicon thin-film transistors with location-controlled crystal grains fabricated by excimer laser crystallization
... position-manipulated silicon grains are essential to high-performance and good uniformity ...10.1063/1.2801525兴 Low-temperature polycrystalline silicon ... See full document
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Improved performance of F-ions-implanted poly-Si thin-film transistors using solid phase crystallization and excimer laser crystallization
... standard poly-Si TFTs and F-ions-implanted poly-Si TFTs for dosage of 5 2 10 cm ...SPC and ELC with the incorporation of fluorine ions are from ...Si-H and Si-Si bonds can prevent hot ... See full document
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Performance enhancement of excimer laser crystallized poly-Si thin film transistors with fluorine implantation technology
... Published by Elsevier B.V. Keywords: Poly-Si TFTs; Fluorine; Excimer laser crystallization ...the poly-Si TFTs were widely used in many applications, especially for active matrix ... See full document
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High-Performance Excimer-Laser-Crystallized Polycrystalline Silicon Thin-Film Transistors with the Pre-Patterned Recessed Channel
... 2012 High-performance polycrystalline silicon (poly-Si) thin-film transistors (TFTs) have been achieved using an excimer laser crystallization method ... See full document
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High-performance low-temperature poly-Si TFTs crystallized by excimer laser irradiation with recessed-channel structure
... Lee, and Huang-Chung Cheng, Member, IEEE Abstract—High-performance low-temperature poly-Si (LTPS) thin-film transistors (TFTs) have been fabricated ... See full document
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High-performance vertically stacked bottom-gate and top-gate polycrystalline silicon thin-film transistors for three-dimensional integrated circuits
... TG poly-Si TFTs were also fabricated. 3. Results and discussion The plane-view scanning electron microscopy (SEM) photo- graphs, as shown in ...2 and 3, verify the grain boundaries in the ... See full document
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High-performance polycrystalline silicon thin-film transistors prepared via the laser crystallization of the prepatterned channel layer on the bottom-gate structure
... posed crystallization method that causes 2-D location-controlled grain ...the excimer laser irradiates on the prepatterned active layer, the laser energy density is controlled to melt the ... See full document
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Simultaneous Activation and Crystallization by Low-Temperature Microwave Annealing for Improved Quality of Amorphous Silicon Thin-Film Transistors
... the performance im- provement of thin-film transistors (TFTs), which function as the pixel switches in ...for high mobility channels, such as organic semiconductors, 1 amorphous ... See full document
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Reliability of laser-activated low-temperature polycrystalline silicon thin-film transistors
... Polycrystalline silicon thin-film transistors 共poly-Si TFTs 兲 are attractive for many applications, such as the switching devices as well as peripheral driving circuits in the active ... See full document
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Characteristics and stress-induced degradation of laser-activated low temperature polycrystalline silicon thin-film transistors
... polycrystalline silicon thin-film transis- tors 共poly-Si TFTs兲 have been extensively investigated for applications in large-area electronics, especially for switch- ing devices or peripheral ... See full document
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High-performance ZnO thin-film transistors fabricated at low temperature on glass substrates
... A high-performance enhancement-mode ZnO thin-film transistor (TFT) on a glass substrate is ...ZnO thin film is deposited by RF magnetron sputtering with the presence of O ... See full document
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Characteristics of top-gate polysilicon thin-film transistors fabricated on fluorine-implanted and crystallized amorphous silicon films
... implanted after the amorphous-silicon (a-Si) crystalliza- tion,3'4 or before the a-Si crystallization.5 For Fli applied after the a-Si crystallization, the fluorine had demonstra- ble pa[r] ... See full document
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Fabrication of high performance low-temperature poly-Si thin-film transistors using a modulated process
... 2002. Low temperature process 共LTP兲 polysilicon thin-film transistors 共poly-Si TFTs兲 have been intensively studied for the application to large-area active matrix liquid-crystal ... See full document
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Planar junctionless poly-Si thin-film transistors with single gate and double gate
... the top gate, the DG devices also showed better electrical characteristics than the SG ones, such as a steeper subthreshold swing and a lower ...better gate controlla- bility and higher ... See full document
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Effects of grain boundaries on performance and hot-carrier reliability of excimer-laser annealed polycrystalline silicon thin film transistors
... INTRODUCTION Excimer-laser-annealed polycrystalline silicon thin film transistors 共poly-Si TFTs兲 have been extensively investigated due to their potential for integration ... See full document
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Low-temperature and low thermal budget fabrication of polycrystalline silicon thin-film transistors
... The ultrahigh vacuum chemical vapor deposition (UHVICVD) grown poly-Si was served as the channel film, the chemical mechanical polishing (CMP) technique was used to polish the channel[r] ... See full document
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