[PDF] Top 20 Microfabrication using silicon mold inserts and hot embossing

... In this paper, anisotropic silicon etch- ing process is used to make fine microstructures on silicon wafer which is then used as mould inserts in the hot em- bossing proces[r] ... See full document

... However, the shape of a hot embossed micro- structure has a better replication than the shape of an injection molded microstructure does.. As shown in Fig.[r] ... See full document

... molding and hot embossing are two major microfabrication ...The mold insert (or master) was fabricated by LIGA-type method. Hot embossing was found to have better ... See full document

... deformation and filling modes during microembossing", ..."Hot Embossing in ...Engineering and Science, ...produced using hot embossing process", Microelectronic ... See full document

... LEE, and KURT W.KOELLING, “Hot Embossing in Microfabrication”, ProQuest Science Journal, ...Park1 and Chul Park, “ Direct surface forming: New polymer processing technology for large ... See full document

... By using gas pressure to press the plastic film onto silicon mold of holes array, microlens array can be directly ...lm and a pitch of 200 lm were successfully ...pressure and 30–90 s ... See full document

... uniform and intensive focusing function of the microlens ...array using gas-assisted micro-hot-embossing process with a silicon holes array ...lm and pitch of 200 lm has been ... See full document

... on hot embossing using a press. When performing hot embossing with a press, both the area and the accuracy of replication are limited due to the inherent non-uniform pressure ... See full document

... Summary and conclusions This paper has reported an innovative method for hot embossing using direct gas pressure to press the mold and ...pressurized hot embossing ... See full document

... Then, hot-embossing technique was applied to duplicate the first needle mold into transparent micro-needle ...guaranteed hot-embossing ...of silicon needle array mold, ... See full document

... elastomer mold techniques to achieve the conformal contact with the surface of ...Soft mold will be used in this ...for hot embossing. Microstructures on a 4 in. silicon wafer have been ... See full document

... inch silicon substrate were fabricated by using gas mixtures of silane, methane, argon and ...metal mold with a hardness of 550 HV was produced through the replication of the Si mold by ... See full document

... novel and effective method to fabricate microlens arrays on polycarbonate films by hybrid extrusion rolling ...cylinder mold bearing an array of micro-holes is fabricated using photolithography with ... See full document

... the mold materials. As the upper mold, a block of stainless steel SUS304 with measure- ments of 10 mm in diameter and 10 mm in height was mounted to ultrasonic horn 2 by a grub screw, and its ... See full document

... Many hot-embossed optical devices use polymers, because they are low weight and their glass transition temperatures (T g ) are lower than those for ...transparency and chemical stability, making them ... See full document

... the hot embossing of polymers, ultrasonic vibration has proven effective [7,8]; however, there is a concern that glass may break if directly subjected to such ...horn and shifts its resonant fre- ... See full document

... ABSTRACT Hot embossing and injection molding and injection compression molding of the mold are process by hot embossing and injection molding or injection ... See full document

... faucet and tap water have much closed ...material and function of the faucet is much improved, farther more, it becomes a guide of civilization ...condition hot compressive the PTFE thin being placed ... See full document

... 雷射成形式直接奈米轉印 (Laser Assisted Direct Imprint,.. LADI).[r] ... See full document

... concave-like mold at taper angles of 15 ◦ , 30 ◦ , and 45 ◦ , ...tip-like mold cases, the molecules underneath the concave mold were upward extruded into the mold space after the ... See full document